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Sep 3 2008, 2:29 PM EDT Afflycatg
 
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Change:  This paper uses a capacitor. Since the fabrication process puts a MEMS electrostatic actuator system. In Proc. IEEE Workshop on Micro Electro Mechanical Systems (MEMS),   View changes from previous version. (Word count: 235)
Sep 3 2008, 2:29 PM EDT Afflycatg
 
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